A5000431629- Ferroelectric and Piezoelectric Materials
- Acoustic Wave Resonator Technologies
- Advanced MEMS and NEMS Technologies
- Structural Health Monitoring Techniques
- Underwater Acoustics Research
- Shape Memory Alloy Transformations
- Semiconductor materials and devices
- Ultrasonics and Acoustic Wave Propagation
Fachhochschule Kiel
2017-2023
Kiel University
2017-2023
Abstract
Piezoelectric materials have been introduced to transistor gate stacks improve MOSFET behaviour and develop sensor applications. In this work, we present an approach a partly industrial field effect transistor, with stack based upon low temperature AlN. Using the piezoelectric of nitrogen-polar AlN, are able drive by inducing strain across device. To ensure maximum sensitivity, material is placed as closely channel possible operated in most sensitive part sub-threshold regime. This allows...
The intricate interdependency of device design and fabrication process complicates the development microelectromechanical systems (MEMS). Commercial pressure has motivated industry to implement various tools methods overcome challenges facilitate volume production. By now, these are only hesitantly being picked up implemented in academic research. In this perspective, applicability research-focused MEMS is investigated. It found that even dynamics a research endeavor, it beneficial adapt...
Piezoelectric materials have been implemented in hydrophones the early 20th century, mostly as cut bulk sensors or cylindrical spherical form made of piezoelectric [1]. Beginning with quartz soon other used, especially lead zirconate titanate its high coefficients has a large improvement acoustic measurements. Nowadays miniaturization is interest, for example, resolution arrays noise monitoring. Thus are needed which less volume similar performance state art materials. Therefore, this work...