A5102981613- Copper Interconnects and Reliability
- Metallic Glasses and Amorphous Alloys
- Magnetic properties of thin films
- Semiconductor materials and devices
- Magnetic Properties and Applications
- Ferroelectric and Piezoelectric Materials
- Acoustic Wave Resonator Technologies
Tokyo Electron (Ireland)
2023
This article presents optimized CoZrTaB-based laminated thin films with a wet etch-able oxide dielectric material. Wet etching capability was studied on the stack material and narrow clean undercut achieved. Good uniaxial anisotropy low coercivity (< 1 Oe) achieved via in situ magnetic alignment during magnetron sputtering. The relative permeability of 432 <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$Q$...
Sputtered FeCoNx thin films with various nitrogen fractions are investigated in the quest of low lossy, soft magnetic (SMFs) for high-frequency inductor core. 100 nm thick were deposited N2 + Ar environment (5 m torr) increasing volume percent, <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$x$ </tex-math></inline-formula> % = N2/(Ar N2), up to 30%. While FeCo film is isotropic, incorporation exhibits a...
Here we report, highly resistive FeCo thin films with enhanced soft magnetic properties (low coercivity and anisotropy) by incorporating nitrogen (N) in the amorphous system. N-doped (FeCoN <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">x</inf> , x= 15, 17.5 19%) are deposited N xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> +Ar environment flow rate up to 19%. Systematic microstructural studies reveal optimum level of (17.5%) obtain...
This paper present an optimized CoZrTaB-based laminated thin films with a novel wet etch-able oxide dielectric material. Wet etching capability was studied on the stack material exhibiting narrow and clean undercut. Good uniaxial anisotropy low coercivity achieved via in-situ magnetic alignment during magnetron sputtering. Permeability of 432 Q-factor 23.4 at 100 MHz were observed in high frequency permeameter measurement. Finally thermal annealing carried out various temperatures. Uniaxial...