Role of Molecular Sieves in the CVD Synthesis of Large‐Area 2D MoTe 2

• DOI: 10.1002/adfm.201603491
• Publication Date: 2016-12-07T13:08:47Z
• Authors: Lin Zhou; Kai Xu; Ahmad Zubair; Xu Zhang; Fangping Ouyang; Tomás Palacios; Mildred S. Dresse...; Yongfeng Li; Jing Kong
• Keywords: Telluride; Tellurium; Deposition

The synthesis of high-quality 2D MoTe2 with a desired phase on SiO2/Si substrate is crucial to its diverse applications. A side reaction Te the Si leading SiTe and Si2Te3 tends happen during growth, resulting in failure obtain MoTe2. It has been found that molecular sieves can adsorb silicon telluride byproducts eliminate influence chemical vapor deposition With help sieves, few-layer 1T′ be grown from MoOx precursor. Pure 2H regions centimeter-sized areas synthesized same piece obtained by using an overlapped geometry. strategy provides new method controllably synthesize phases generalizable other tellurium-based layered materials.