Probe‐Based 3‐D Nanolithography Using Self‐Amplified Depolymerization Polymers

• DOI: 10.1002/adma.200904386
• Publication Date: 2010-04-23T17:20:08Z
• Authors: Armin W. Knoll; David Pires; Olivier Coulembier; Philippe Dubois; James L. Hedrick; Jane Frommer; Urs Duerig
• Keywords: Depolymerization

3D patterning by means of probe-assisted thermal decomposition has been achieved on phthalaldehyde polymer films with 1 nm vertical resolution and 40 lateral resolution. Highly efficient is enabled a self-amplified depolymerization mechanism. Pixel writing speeds the order microseconds are demonstrated.