Wearable Respiration Sensor for Continuous Healthcare Monitoring Using a Micro‐Thermoelectric Generator with Rapid Response Time and Chip‐Level Design

• DOI: 10.1002/admt.202101416
• Publication Date: 2022-02-09T12:27:54Z
• Authors: Yuedong Yu; Wei Zhu; Jie Zhou; Zhanpeng Guo; Yutong Liu; Yuan Deng
• Keywords: Thermoelectric generator; Response time; Thermoelectric cooling

Abstract Thermoelectric generators (TEG) serve as excellent passive wearable sensors for monitoring human body heat. However, a micro‐TEG (μTEG) with chip‐level size, rapid response, and high stable responsivity is desired real‐time full‐time respiration to predict diagnose breath‐related diseases. In this study, thin‐film compact μ TEG elaborately designed by combining an ultrathin vertical structure heat conduction horizontal high‐integration density transient response filling rate. The device integrated 28‐pair micro thermoelectric (TE) legs fabricated on aluminum nitride (AlN) substrate, which patterned using ultrafast laser direct writing embedded bottom contacts TE legs. This unique design of the proposed provides 8 ms size 1.9 mm × 2.7 400 m easy wearability. Additionally, application scenarios are demonstrated mounting μTEG under nostril near mouth. recorded airflow signals displayed precisely distinct features separating nose mouth breathing. Thus, study presents subtle sensor physiological signal acquisition.