Femtosecond Laser Fabrication of Microchannels in Transparent Hard Materials

• DOI: 10.1002/admt.202300015
• Publication Date: 2023-04-03T02:55:28Z
• Authors: Yue Lu; Yun‐Fei Li; Gong Wang; Yu Yu; Zhenxu Bai; Yulei Wang; ZhiWei Lu
• Keywords: Microchannel; Microreactor; Materials processing

Abstract The excellent characteristics of transparent hard materials such as high hardness, transparency, corrosion resistance, and temperature resistance enable their applications in microfluidic substrates even harsh environments. Microchannels are important parts systems, the preparation microchannel structures deserves further in‐depth study. traditional processing method is contact with large thermal influence low efficiency, so it impossible to obtain complex microchannels quality aspect ratio. femtosecond laser a non‐contact approach no damage, accuracy, easy form microchannels, making best choice for materials. This work reviews recent advances structures, focusing on reaction mechanism, methods, obtained including surface 2D 3D microchannels. Furthermore, application structure field, optical inspection biochemical reaction, also described.