Terahertz Barcodes Enabled by All‐Silicon Metasurfaces for Process Control and Monitoring Applications (Adv. Mater. Technol. 5/2023)

• DOI: 10.1002/admt.202370024
• Publication Date: 2023-03-10T15:20:31Z
• Authors: Lingyun Zhang; Hao Ma; Zhenci Sun; Zilun Wang; Kebin Fan; Biaobing Jin; Rui You; Xiaoguang Zhao; Zheng You
• Keywords: Barcode

Semiconductor Process Monitoring In article number 2201631, Zheng You, Xiaoguang Zhao, Lingyun Zhang, and co-workers present terahertz barcodes consisting of electromagnetic metasurfaces as effective materials for semiconductor process control monitoring applications. Once interrogated through a spectrometer, the response barcode reveals status information about deep silicon etching process, enabling real-time, in situ, non-contact measurement several critical parameters.