ChemInform Abstract: THE ELECTROLYTE‐SILICON INTERFACE; ANODIC DISSOLUTION AND CARRIER CONCENTRATION PROFILING

• DOI: 10.1002/chin.198101007
• Publication Date: 2016-04-22T19:49:53Z
• Authors: C. D. SHARPE; P. LILLEY
• Keywords: Profiling (computer programming)

The electrical behavior of the electrolyte‐silicon interface has been investigated. , , and anodic dissolution phenomena are discussed in relation to the feasibility of using the interface for the determination of carrier concentration profiles in silicon structures; specimen electrochemical profiles are presented and compared with corresponding spreading resistance profiles.