High Resolution Surface Metrology Using Microsphere‐Assisted Interference Microscopy

• DOI: 10.1002/pssa.201800761
• Publication Date: 2019-02-21T18:27:38Z
• Authors: Paul C. Montgomery; Sylvain Lecler; Audrey Leong‐Hoï; Stéphane Perrin
• Keywords: Nanometrology; Interference microscopy; Glass microsphere; Microelectronics; Nanodot

The authors review some of the latest results a new high resolution optical metrology technique using small glass microspheres placed on sample to enhance lateral in microscopy. Experimental are shown 2D images gratings and microelectronic structures. simulations experimental measurements for imaging through show an increase magnification 3–5 times as 100 nm air. also 3D different nanostructures that have successfully been incorporated into Mirau Linnik type interferometers. Results grooves Blu‐Ray discs, narrow etched Si, nanotextured stainless steel surfaces, Ag nanodots. Measurements SEM AFM given comparison. Some artefacts sources errors microsphere‐assisted presented discussed. thus demonstrate interference microscopy is promising tool nanometrology.