Integration of individual TiO2 nanotube on the chip: Nanodevice for hydrogen sensing

• DOI: 10.1002/pssr.201409562
• Publication Date: 2015-02-25T09:39:22Z
• Authors: Mihail Enachi; Oleg Lupan; Tudor Braniste; Andrei Sarua; Lee Chow; Yogendra K. Mishra; Dawit Gedamu; Rainer Adelung; Ion Tiginyanu
• Keywords: Rutile; Nanomaterials

Titania (TiO 2 ) exists in several phases possessing different physical properties. In view of this fact, we report on three types hydrogen sensors based individual TiO nanotubes (NTs) with structures consisting amorphous, anatase or anatase/rutile mixed phases. Different the NTs were produced by controlling temperature post‐anodization thermal treatment. Integration chip was performed employing metal deposition function focused ion beam (FIB/SEM) instrument. Gas response studied for devices made from an as‐grown nanotube amorphous structure, as well thermally annealed exhibiting crystalline phase heterogeneous structure. Based electrical measurements using two Pt complex contacts deposited a single nanotube, show that NT crystal structure at 650 °C has higher gas to room than samples 450 and as‐grown. The obtained results demonstrate structural properties make them viable new sensing nanomaterial temperature. (© 2015 WILEY‐VCH Verlag GmbH &Co. KGaA, Weinheim)