10.2: 31‐inch AMOLED Display with T/G IGZO Oxide Backplane produced in the Gen.11 line

• DOI: 10.1002/sdtp.15864
• Publication Date: 2022-10-17T10:36:15Z
• Authors: Qianhui Sun; Zhaosong Liu; Yuanpeng Chen; Yunxi Liu; YuanJun Hsu; Weiran Cao; Yuan-chun Wu; Xin Zhang
• Keywords: 0103 physical sciences; 01 natural sciences

A top gate IGZO TFT back panel for AMOLED display was fabricated on the G11 substrate, which exhibits excellent electrical properties and uniformity, the performance can meet the electrical requirements for large‐size display devices. The 108 points measurement was carried out to evaluate the Vth distribution on the G11 substrate, which shows the Vth range is ‐0.5V~0.5V, also the ΔVth under PBTS and NBTiS for 1 hour on the G11 substrate are less than +0.59 V and −0.22 V, respectively. Finally, we have successfully demonstrated a 31‐inch OLED display driven by the backplane produced in the G11 facility.