Surface hydrophilization of SU‐8 by plasma and wet chemical processes

• DOI: 10.1002/sia.3515
• Publication Date: 2010-06-01T19:15:35Z
• Authors: Ferdinand Walther; Tanja Drobek; Alexander M. Gigler; Marc Hennemeyer; Michael Kaiser; Helmut Herberg; Tetsuji Shimitsu; Gregor E. Morfill; Robert W. Stark
• Keywords: Hydrophilization

Abstract Wetting properties and surface roughness of SU‐8 can be modified by wet chemical plasma processes. These processes result in an enhanced wettability that attributed to increase CO COO groups at the surface. Wet etching with ceric ammonium nitrate (CAN) rendered hydrophilic. However, it also led accumulation cerium species on surface, which may interfere biochemical reactions device. Surface activation could achieved a low‐temperature atmospheric argon plasma, left smooth Treatment oxygen stable hydrophilization increased roughness. Owing processing, antimony were accumulated removed cleaning step. In order maintain after treatment for storage, or over several wetting cycles, coated protein‐resistant graft copolymer (PLL‐ g ‐PEG). Copyright © 2010 John Wiley & Sons, Ltd.