Advances in Flexible Thermoelectric Materials and Devices Fabricated by Magnetron Sputtering

• DOI: 10.1002/smsc.202300061
• Publication Date: 2023-07-19T04:57:18Z
• Authors: Boxuan Hu; Xiao-Lei Shi; Tianyi Cao; Meng Li; Wenyi Chen; Wei-Di Liu; Wanyu Lyu; Tuquabo Tesfamichael; Zhi-Gang Chen
• Keywords: Cavity magnetron

Due to the direct conversion between thermal and electrical energy, thermoelectric materials their devices exhibit great potential for power generation refrigeration. With rapid development of personal wearable electronics, design flexible inorganic receives increasing attention. As one most mature thin‐film fabrication techniques, magnetron sputtering plays a key role in thin films devices, but its progress is still not timely comprehensively reviewed. Herein, recent advances sputtering‐fabricated are studied, including properties, mechanical device routes. The differences properties under different conditions, as well underlying mechanisms, carefully discussed. In end, it pointed out challenges future directions sputtering‐prepared practical applications. This review can serve useful reference guide prepared by magnetron‐sputtering‐based deposition techniques.