Daily planning and scheduling system for the EDS process in a semiconductor manufacturing facility

• DOI: 10.1007/s00170-008-1505-6
• Publication Date: 2008-05-26T09:01:52Z
• Authors: Young Hoon Lee; Myoungsoo Ham; Bruce Yoo; Jae Sun Lee
• Keywords: Semiconductor device fabrication; Production control

Operations management in a complex manufacturing environment is practiced hierarchically: production planning and scheduling in sequence since the integrated approach is not efficient and practical. Production targets and allocation to the equipment are determined in the planning procedure by considering the only the critical factors, and the detailed scheduling is determined with more information needed to accomplish the production targets provided in the planning step. There is always, therefore, a gap between the planning and scheduling procedure, and some control parameters or factors are used to control those gaps. In this paper an approach connecting two procedures is suggested, which can be applied in the EDS (electrical die sorting) or the probe process in the semiconductor manufacturing. The EDS process requires very flexible operation management since the manufacturing processing time is relatively short and the supply of upstream fabrication and the demand of downstream assembly have to be met simultaneously. Daily planning and scheduling procedure are modeled to minimize the tester change-over within the daily target. Because of the relatively long setup change-over time, daily planning and scheduling have to be performed so that the time needed for the device and probe card change is minimized as possible. Mathematical programming is suggested for the problem, and the modified model is developed which can be solved in a practical computational time on a daily base. The scheduling heuristic with the planning data obtained from the suggested model, is designed, and their performance is evaluated through the computational experiment.