Atomic layer deposition of hafnium oxide on porous silicon to form a template for athermal SERS-active substrates

• DOI: 10.1007/s00339-023-06592-3
• Publication Date: 2023-03-27T15:03:29Z
• Authors: K. Girel; A. Burko; S. Zavatski; A. Barysiuk; K. Litvinova; E. Eganova; A. Tarasov; D. Novikov; S. Dubkov; H. Bandarenka
• Keywords: Passivation; Porous Silicon