A novel laser transfer process for direct writing of electronic and sensor materials

• DOI: 10.1007/s003390051400
• Publication Date: 2002-08-25T09:25:39Z
• Authors: A. Piqué; D.B. Chrisey; R.C.Y. Auyeung; J. Fitz-Gerald; H.D. Wu; R.A. McGill; S. Lakeou; P.K. Wu; V. Nguyen; M. Duignan
• Keywords: Deposition

MAPLE direct write (MAPLE DW) is a new laser-based direct-write technique which combines the basic approach employed in laser-induced forward transfer (LIFT) with the unique advantages of matrix-assisted pulsed-laser evaporation (MAPLE). MAPLE DW utilizes an optically transparent substrate coated on one side with a matrix con- sisting of the material to be transferred mixed with a polymer or organic binder. As in LIFT, the laser is focused through the transparent substrate onto the matrix. When a laser pulse strikes the matrix, the binder decomposes and aids the trans- fer of the material of interest to an acceptor substrate placed parallel to the matrix surface. MAPLE DW is a maskless deposition process which operates in air and at room tempera- ture. Powders of Ag, BaTiO3, SrTiO3 ,a ndY3Fe5O12 with average diameters of 1 mm were transferred onto the surfaces of alumina, glass, silicon, and printed circuit board substrates. Parallel-plate and interdigitated capacitors and flat induc- tors were produced by MAPLE DW over Rogers RO4003 substrates. MAPLE DW was also used to transfer poly- mer composites for the fabrication of gas sensor chemore- sistors. One such composite chemoresistor fabricated with polyepichlorohydrin=graphite was used to detect organic va- pors with a sensitivity of parts per million.