Study on the stability of gas film in electrochemical discharge machining of ultra-white glass micro array holes

• DOI: 10.1007/s00542-019-04623-9
• Publication Date: 2019-09-19T21:26:14Z
• Authors: Liang Huang; Yan Cao; Feng Jia; Yan Lei
• Keywords: 0209 industrial biotechnology; 02 engineering and technology

With the widespread application of non-conducting tough materials, such as ultra-white glass in MEMS recent years, many difficulties have arisen in the processing of these kind of material with eigen-structure characteristics. By analyzing the generation principle of interelectrode gas film of this kind of material, the breakdown characteristics of gas film under different power supply parameters are studied, and the relationship between the process parameters and the forming quality, material removal rate under the condition of gas film stability is further analyzed, so as to realize the optimal selection and the ultra-white glass micro array holes successfully machined.