Enhanced adhesion of PMMA to copper with black oxide for electrodeposition of high aspect ratio nickel-iron microstructures

• DOI: 10.1007/s005420050100
• Publication Date: 2002-08-25T09:09:23Z
• Authors: V. K. P. Kanigich...; K. W. Kelly; E. Ma; W. Wang; M. C. Murphy
• Keywords: Plating (geology); LIGA; Copper plating

Copper is widely used as a plating base for soft magnetic alloy electrodeposition in sensors and actuators. PMMA, the X-ray resist used in the LIGA process, typically has poor adhesion with copper. The use of black oxide of copper to enhance PMMA-copper adhesion was investigated. In this work, peel strength as a function of treatment time and the method of bonding was evaluated using an ASTM standard T-peel test. Peel strength increased with increasing treatment time. The feasibility of producing microstructures with predictable 3-D geometry for use in resonating sensors was investigated using the process developed. Nickel-iron structures of 100-1000 micrometers wide and 500 micrometers tall were successfully electrodeposited. Growth of other representative microstructures is being investigated.