Investigation of the time evolution of plasma parameters in a pulsed magnetron discharge

• DOI: 10.1007/s10582-006-0375-0
• Publication Date: 2006-11-03T00:50:45Z
• Authors: V. Straňák; P. Adámek; J. Blažek; P. Špatenka; Z. Hubička; M. Tichý; R. Hippler; S. Wrehde
• Keywords: 02 engineering and technology; 0210 nano-technology; 7. Clean energy

Unbalanced DC pulse magnetron discharge with Ti target in Ar and Ar/O2 working gases was investigated by means of time resolved Lagmuir probe diagnostics.We have used in our work very low average DC discharge current up to 1 A but high instant discharge current about 10 A in the active part of pulse cycle. The experiments were carried out under higher pressures (up to 15 Pa) than usual. Temporal evolutions of internal plasma parameters such as electron density, electron temperature, plasma potential and EEPF are determined from the time-resolved probe data as dependences on pressure.