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Substrate-dependent structural evolution during the oxidation of SiNx thin films

DOI: 10.1007/s10853-024-09751-w Publication Date: 2024-05-18T20:10:29Z
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AUTHORS (10)
Gowun Jung
Sehun Kim
Jiho Eom
In Young Song
Jinhee Lee
Seong-Keun Cho
Wang-Eun Lee
Kyuyoung Heo
Tae-Yeon Cho
Hwanhui Yun
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