Highly Selective Plasma Etching Technique for Molybdenum

• DOI: 10.1007/s11090-023-10318-x
• Publication Date: 2023-02-19T22:25:15Z
• Authors: Artem A. Osipov; Nikolai A. Andrianov; Anastasia B. Spes...; Alina E. Gagaeva; Sarah Risquez; Alexandr Vorobyev; Sergey E. Alexandrov
• Keywords: 0103 physical sciences; 02 engineering and technology; 0210 nano-technology; 01 natural sciences