Analyzing electrostatic modulation of signal transduction efficiency in MoS2 nanoelectromechanical resonators with interferometric readout

• DOI: 10.1007/s11432-021-3297-x
• Publication Date: 2022-01-25T05:17:56Z
• Authors: Jiankai Zhu; Pengcheng Zhang; Rui Yang; Zenghui Wang
• Keywords: 0301 basic medicine; 03 medical and health sciences

Optical interferometry is a highly sensitive method for detecting the miniscule resonant motion in two-dimensional (2D) nanoelectromechanical systems (NEMS). However, the technique to control the interferometry signal strength has not been fully understood. In this work, we preset analytical modeling of an effective method for tuning motion-to-signal responsivity in interferometric detection of 2D molybdenum disulfide (MoS2) NEMS resonators. We show that the responsivity can be tuned very efficiently, all the way from maximum to 0, by varying the vacuum gap underneath the 2D membrane electrostatically. We further show that the gate voltage corresponding to 0 responsivity, which means no motion signal can be detected, varies with the MoS2 thickness, diameter, pre-strain and initial vacuum gap. Our findings provide an important guideline for optimizing measurement conditions when detecting motion in 2D NEMS structures using laser interferometry.