Controlled Directional Cu Outflow in Cu/W Nanomultilayers

• DOI: 10.1007/s11665-024-09763-2
• Publication Date: 2024-07-02T19:01:42Z
• Authors: G. Lorenzin; B. Rheingans; J. Janczak-Rusch; C. Cancellieri
• Keywords: Outflow

Abstract In this study, we have investigated the feasibility of localized, focused ion beam (FIB)-stimulated Cu outflow in Cu/W nanomultilayers (NMLs) for manufacturing heterogeneous micro-/nanojoints. Sub-micron-sized trenches were created on nanomultilayer surface prior to heat treatment with aim directing diffusion locally defined NML regions. was triggered by annealing at 500 °C a reducing atmosphere and lead formation (sub-)micron-sized particles that are firmly joined W-terminated NML. The results show not only depth (i.e., parameters FIB treatment), but also stress microstructure NMLs influence directional transport. found be much more pronounced when multilayer has disordered pores open grain boundaries, as observed tensile stress. We thus demonstrated patterning enables localized generation can used