Synthesis and characterization of TiO2 nanotubes for humidity sensing

• DOI: 10.1016/j.apsusc.2008.02.106
• Publication Date: 2008-03-07T19:26:39Z
• Authors: Yanyan Zhang; Wuyou Fu; Haibin Yang; Qi Qi; Yi Zeng; Tong Zhang; Ruixia Ge; Guangtian Zou
• Keywords: 02 engineering and technology; 0210 nano-technology; 01 natural sciences; 0104 chemical sciences

Abstract The highly ordered TiO2 thin films are prepared by anodic oxidation and calcined at 300, 400, 500 and 600 °C, respectively. X-ray diffraction (XRD) and field emission scanning electron microscopy (FESEM) are employed to analyze the structure and the morphology of the TiO2 films. We design a novel sensor to investigate the humidity sensing behaviours of the samples. The samples calcined at 600 °C show high sensitivity with nearly two orders change in the resistance and short response and recovery time (