Development of carbon sphere/ceria (CS/CeO2) heterostructured particles and their applications to functional abrasives toward photochemical mechanical polishing

• DOI: 10.1016/j.apsusc.2022.153449
• Publication Date: 2022-04-19T15:47:48Z
• Authors: Tianyu Wang; Yue Chen; Ailian Chen; Yang Chen
• Keywords: 01 natural sciences; 0104 chemical sciences