Near-surface analysis of magnetron sputtered AlCrNbYZrNx high entropy materials resolved by HAXPES

• DOI: 10.1016/j.apsusc.2024.160349
• Publication Date: 2024-05-23T02:43:11Z
• Authors: Aishwarya Srinath; Kristina von Fieandt; Stefan Fritze; Leif Nyholm; Erik Lewin; Rebecka Lindblad
• Keywords: Cavity magnetron; High-Entropy Alloys

Hard X-ray photoelectron spectroscopy (HAXPES) was used to perform a non-destructive depth profile of AlCrNbYZrNx (x = 0 ∼50 at.%) thin films. The outermost native oxide the pristine films contained highest coordination oxides every metal. Substoichiometric or oxynitrides were found underneath. After exposure 1.0 M HCl, increases in most highly coordinated Cr, Nb, and Al with up 37 at.% N observed, suggesting that low subsurface had been further oxidised intermediary compounds passivation process. Y lost HCl electrolyte, agreement their respective Pourbaix diagrams. film 49 showed little no change data due its high porosity which led being detected at all probed depths. metal core level spectra revealed preferential order nitrogen bonded different metals. Nitrogen interacted first Y, then Zr, lastly Cr as content increased.