NanoESCA: imaging UPS and XPS with high energy resolution

• DOI: 10.1016/j.elspec.2005.01.250
• Publication Date: 2005-04-21T07:41:09Z
• Authors: M. Escher; N. Weber; M. Merkel; B. Krömker; D. Funnemann; S. Schmidt; F. Reinert; F. Forster; S. Hüfner; P. Bernhard; Ch. Ziethen; H.J. Elmers; G. Schönhense
• Keywords: 0103 physical sciences; 01 natural sciences

Abstract A novel imaging electron spectrometer has been used for laterally resolved ultraviolet photoelectron spectroscopy (UPS) and X-ray photoelectron spectroscopy (XPS) in the soft X-ray range. The instrument is based on a high-resolution emission microscope optics using a cathode lens and an imaging dispersive analyser. The analyser is corrected for the leading aberration term ( α 2 -term) by means of two hemispherical analysers in antisymmetric configuration with an appropriate transfer lens. Small-area spectra as well as energy-filtered images have been taken in the soft X-ray range for a meteorite sample and in the range of the d-band of a Cu polycrystal. An energy resolution of 106 meV along with a high spatial resolution allows a detailed analysis of trace elements in the meteorite sample as well as local UPS spectra of the surface of the Cu sample.