Investigation of novel suppressor Nitrotetrazolium Blue chloride on cobalt superconformal growth

• DOI: 10.1016/j.jmapro.2023.05.059
• Publication Date: 2023-06-07T21:16:18Z
• Authors: Yaqiang Li; Xiaochuan Ma; Chengzhi Li; Ruopeng Li; Jinqiu Zhang; Peixia Yang; Xinyu Liu; Peter Broekmann; Bo Wang; Wenquan Lv; Maozhong An
• Keywords: Cobalt chloride