Non-destructive depth reconstruction of Al-Al2Cu layer structure with nanometer resolution using extreme ultraviolet coherence tomography

• DOI: 10.1016/j.matchar.2024.113894
• Publication Date: 2024-04-15T14:08:50Z
• Authors: Johann J. Abel; Jonathan Apell; Felix Wiesner; Julius Reinhard; Martin Wünsche; Nadja Felde; Gabriele Schmidl; Jonathan Plentz; Gerhard G. Paulus; Stephanie Lippmann; Silvio Fuchs
• Keywords: info:eu-repo/classification/ddc/670; Condensed Matter - Materials Science; 670; Materials Science (cond-mat.mtrl-sci); FOS: Physical sciences; Physics - Applied Physics; Applied Physics (physics.app-ph); Physics - Optics; Optics (physics.optics)

Materials characterization 211, 113894 (2024). doi:10.1016/j.matchar.2024.113894<br/>Published by Science Direct, New York, NY<br/>