Non-destructive depth reconstruction of Al-Al2Cu layer structure with nanometer resolution using extreme ultraviolet coherence tomography

• DOI: 10.1016/j.matchar.2024.113894
• Publication Date: 2024-04-15T14:08:50Z
• Authors: Johann J. Abel; Jonathan Apell; Felix Wiesner; Julius Reinhard; Martin Wünsche; Nadja Felde; Gabriele Schmidl; Jonathan Plentz; Gerhard G. Paulus; Stephanie Lippmann; Silvio Fuchs
• Keywords: Extreme ultraviolet; Characterization; Nanometre; Ultraviolet

Non-destructive cross-sectional characterization of materials systems with a resolution in the nanometer range and ability to allow for time-resolved in-situ studies is great importance material science. Here, we present such measurements method, extreme ultraviolet coherence tomography (XCT). The method non-destructive during sample preparation as well measurement, which distinguished by negligible thermal load compared electron microscopy methods. Laser-generated radiation (XUV) soft x-ray used characterization. measurement principle interferometric signal evaluation performed via an iterative Fourier analysis. demonstrated on metallic system Al-Al2Cu atomic force measurements. We also advanced reconstruction methods XCT, even determination roughness outer inner interfaces.