Non-destructive depth reconstruction of Al-Al2Cu layer structure with nanometer resolution using extreme ultraviolet coherence tomography

info:eu-repo/classification/ddc/670 Condensed Matter - Materials Science 670 Materials Science (cond-mat.mtrl-sci) FOS: Physical sciences Physics - Applied Physics Applied Physics (physics.app-ph) Physics - Optics Optics (physics.optics)
DOI: 10.1016/j.matchar.2024.113894 Publication Date: 2024-04-15T14:08:50Z
ABSTRACT
Materials characterization 211, 113894 (2024). doi:10.1016/j.matchar.2024.113894<br/>Published by Science Direct, New York, NY<br/>
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