Non-destructive depth reconstruction of Al-Al2Cu layer structure with nanometer resolution using extreme ultraviolet coherence tomography
info:eu-repo/classification/ddc/670
Condensed Matter - Materials Science
670
Materials Science (cond-mat.mtrl-sci)
FOS: Physical sciences
Physics - Applied Physics
Applied Physics (physics.app-ph)
Physics - Optics
Optics (physics.optics)
DOI:
10.1016/j.matchar.2024.113894
Publication Date:
2024-04-15T14:08:50Z
AUTHORS (11)
ABSTRACT
Materials characterization 211, 113894 (2024). doi:10.1016/j.matchar.2024.113894<br/>Published by Science Direct, New York, NY<br/>
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