Ultralow line edge roughness of hybrid multilayer Extreme ultraviolet resist with vertical molecular wire structure

• DOI: 10.1016/j.mattod.2025.04.007
• Publication Date: 2025-04-24T03:54:53Z
• Authors: Jaehyuk Lee; Hyeonseok Ji; Chawon Koh; Juyeong Lee; Ji-Hoo Seok; Jinho Ahn; Chang Gyoun Kim; Jiho Kim; Inhui Hwang; Hyungju Ahn; Kug-Seung Lee; Sangsul Lee; Dimitrios Kazazis; Prajith Karadan; Yasin Ekinci; Gregory Denbeaux; Ji Young Park; Won-Joon Son; Seungmin Lee; Tsunehiro Nishi; Bruno La Fontaine; Myung Mo Sung