Fabrication of MMI optical power splitter by UV embossing with PDMS mold

• DOI: 10.1016/j.mee.2007.01.090
• Publication Date: 2007-02-05T16:02:37Z
• Authors: Chul-Hyun Choi; Min-Woo Lee; Jun-Ho Sung; Bo Soon Kim; Beom-Hoan O
• Keywords: 0202 electrical engineering, electronic engineering, information engineering; 02 engineering and technology

We report on UV embossing process for realizing an optical power splitter using a UV curable polymer material. The polydimethylsiloxane (PDMS) mold transferred from the master was used for forming the micro-scale structure and patterning repeatedly it. We experimented also on the durability of the PDMS mold in casting a UV curable polymer. Residual layer thickness on the replica was observed to be below 0.5@mm.