Reduction of vacancy defects induced by thermal annealing in β-Ga2O3 epilayer

• DOI: 10.1016/j.micrna.2023.207525
• Publication Date: 2023-01-30T19:41:52Z
• Authors: Teng Fan; Ning Tang; Jiaqi Wei; Shixiong Zhang; Zhenhao Sun; Guoping Li; Jiayang Jiang; Lei Fu; Yunfan Zhang; Ye Yuan; Xin Rong; Weikun Ge; Xinqiang Wang; Bo Shen
• Keywords: 02 engineering and technology; 0210 nano-technology