Cross-sectional geometry effect on bending strength of gold micro-cantilever with trapezoidal cross-section

• DOI: 10.1016/j.mne.2024.100259
• Publication Date: 2024-05-12T00:24:47Z
• Authors: Ryohei Hori; Kazuya Fujita; Chun Yi Chen; Tomoyuki Kurioka; Jhen-Yang Wu; Tso-Fu Mark Chang; Katsuyuki Machida; Hiroyuki Ito; Yoshihiro Miyake; Masato Sone
• Keywords: Trapezoidal cross-section; Yield strength; TK7800-8360; Cross-sectional geometry effect; 02 engineering and technology; Micro-cantilever; T1-995; Bending test; Gold; Electronics; 0210 nano-technology; Technology (General)

Gold is a promising material for movable components in MEMS devices by the high mass density, which allows reduction of the Brownian noise. Mechanical properties of metallic materials are known to be affected by the sample size effect. When bending test is utilized, the sample geometry effect is another factor. In this study, effects of the shape of the cross-section, or the cross-sectional geometry effect, are evaluated using micro-cantilevers with a trapezoidal cross-section. The yield stresses are ranged from 112 MPa to 185 MPa in micro-cantilevers composed of single crystalline gold, and the yield stresses varied from 372 MPa to 489 MPa in polycrystalline gold micro-cantilevers. The yield stress is found to be higher in the micro-cantilever having a smaller ratio of the top width over the bottom width, which demonstrates the cross-sectional geometry effect. Also, the cross-sectional geometry effect is more significant in the polycrystalline micro-cantilevers.