Nano-polishing characteristics in vibration-assisted CMP of single-crystal silicon carbide via molecular dynamics simulations

• DOI: 10.1016/j.mssp.2023.107637
• Publication Date: 2023-06-01T14:56:29Z
• Authors: Yan He; Wenzhi Tang; Peng Gao; Meiling Tang; Lin Fan; Ying Wang
• Keywords: Dangling bond; Chemical Mechanical Planarization; ReaxFF; Crystal (programming language); Abrasion (mechanical)