Effect of moisture on the properties of hafnium zirconium oxide ferroelectric thin films

• DOI: 10.1016/j.mssp.2025.109439
• Publication Date: 2025-03-08T21:44:05Z
• Authors: Fan Wu; Jianguo Li; Zeping Weng; Junliang Zhou; Lijian Chen; Haomin Sun; Danben He; Daolin Cai; Yi Zhao
• Keywords: Hafnium