Graphical user interface for SDTrimSP to simulate sputtering, ion implantation and the dynamic effects of ion irradiation

• DOI: 10.1016/j.nimb.2022.04.008
• Publication Date: 2022-05-11T10:25:43Z
• Authors: P.S. Szabo; D. Weichselbaum; H. Biber; C. Cupak; A. Mutzke; R.A. Wilhelm; F. Aumayr
• Keywords: Graphical user interface; Python; Interface (matter)

SDTrimSP is a popular simulation program to compute several effects of the interaction between an impinging ion and solid, such as implantation ranges, damage formation or sputtering surface atoms. We now introduce graphical user interface for make its operation more accessible broad group users. It written separate Python not restricted any specific operating system. The allows quick easy start well direct evaluation simulations. Its capabilities are demonstrated here in form example cases, including dynamic simulations with SDTrimSP, where ion-induced target changes taken into account. presented made freely available support large number users performing ion–solid interaction.