Au nanopillar array prepared by selective etching of Au-Sr3Al2O6 vertically aligned nanocomposite thin films

• DOI: 10.1016/j.nxnano.2024.100071
• Publication Date: 2024-04-18T09:12:07Z
• Authors: Benson Kunhung Tsai; Jiawei Song; Juncheng Liu; Jianan Shen; Yizhi Zhang; Xinghang Zhang; Haiyan Wang
• Keywords: Nanopillar; Isotropic etching

Au nanostructures offer a wide range of applications such as surface-enhanced Raman spectroscopy, photovoltaics, and biosensors. Effective integrating well-controlled on chip via self-assembly process remains challenging most the were prepared by either chemical synthesis methods or lithography patterning techniques. This study introduces simple two-step approach for fabricating substrate with well controlled morphology density. First, epitaxial Au-Sr3Al2O6 (SAO) vertically aligned nanocomposites (VANs) deposited SrTiO3 substrates. Second, subsequently dissolving water-soluble SAO matrix, various ranging from 0D nanoparticles to 1D nanopillars are demonstrated. The tuning is achieved varying deposition parameters VANs. method eliminates need harsh solutions tedious lithography/patterning steps. These findings provide novel strategy tailoring their optical properties, and, demonstrating on-chip integration advanced device applications.