Influence of carbon deficiency on phase formation and thermal stability of super-hard TaCy thin films

• DOI: 10.1016/j.scriptamat.2018.02.030
• Publication Date: 2018-03-09T06:46:34Z
• Authors: H. Riedl; T. Glechner; T. Wojcik; N. Koutná; S. Kolozsvári; V. Paneta; D. Holec; D. Primetzhofer; P.H. Mayrhofer
• Keywords: 0205 materials engineering; 02 engineering and technology; 0210 nano-technology

Using nonreactive sputter deposition allows the preparation of single-phase fcc structured TaCy thin films over a wide compositional range with y between 0.63 and 1.04. Among this composition range ...