Cantilever-based microsystem for contact and non-contact deposition of picoliter biological samples

• DOI: 10.1016/j.sna.2003.09.024
• Publication Date: 2003-12-04T08:59:39Z
• Authors: Pascal Belaubre; Matthieu Guirardel; Véronique Leberre; Jean-Bernard Pour...; Christian Bergaud
• Keywords: Microsystem; Deposition; Electrical contacts

This paper describes a cantilever-based microsystem that permits the deposition of picoliter biological samples using a contact or non-contact method. Arrays of silicon-based cantilevers have been used to produce DNA microarrays. An electrowetting-on-dielectric (EWOD) principle is applied for the loading of the liquid by controlling surface tension. Deposition is achieved by direct contact between cantilevers and the surface by capillary transport. A non-contact deposition method has also been developed. It consists in an electric-field applied between the cantilevers and a conductive surface. The results obtained demonstrate that our system meets the need for producing high-density DNA, protein and cell chips.