AlScN based MEMS quasi-static mirror matrix with large tilting angle and high linearity

• DOI: 10.1016/j.sna.2020.112107
• Publication Date: 2020-05-31T05:52:13Z
• Authors: S. Gu-Stoppel; T. Lisec; S. Fichtner; N. Funck; M. Claus; B. Wagner; F. Lofink
• Keywords: Linearity

This paper presents a piezoelectrically (AlScN) driven 3 × quasi-static mirror matrix, where each MEMS utilizes three-level-construction comprising plate (diameter = 0.8 mm), pillar and four AlScN actuators hidden beneath the plate, reducing chip size to 1.1 1.3 mm2. as high performance piezoelectric material is used deliver large force enabling mechanical tilting angle of ±14° at 150 VDC, in addition great linearity, repeatability long-term stability. For realizing 3D construction three wafers for TSV wafer vertical electrical contacts are applied. While first demonstrators have been manufactured by chip-level hybrid assembly mount plates onto actuators, BEOL triple-wafer-bonding process has developed integrate wafer. will show design efforts improving behavior mirrors, effort current result triple-wafer-bonding. It concludes discussing technological achievements, challenges outlook improved due development AlScN.