Tackling residual tensile stress in AlN-on-Si nucleation layers via the controlled Si(111) surface nitridation

• DOI: 10.1016/j.surfin.2024.104817
• Publication Date: 2024-07-20T01:39:00Z
• Authors: Denis Milakhin; Timur Malin; Vladimir Mansurov; Yan Maidebura; Dmitriy Bashkatov; Ilya Milekhin; Sergey Goryainov; Vladimir Volodin; Ivan Loshkarev; Vladimir Vdovin; Anton Gutakovskii; Sergei Ponomarev; Konstantin Zhuravlev