Pure brookite titania crystals with large surface area deposited by Plasma Enhanced Chemical Vapour Deposition technique

• DOI: 10.1016/j.tsf.2008.02.002
• Publication Date: 2008-02-12T15:10:15Z
• Authors: K.M.K. Srivatsa; Mrinmoyee Bera; A. Basu
• Keywords: Brookite; Deposition

Abstract Pure brookite phase titania crystals with large surface area have been synthesized at room temperature by the Plasma Enhanced Chemical Vapour Deposition technique, using titanium tetra-isopropoxide vapour, argon and oxygen mixtures, deposited on silicon (100) substrates under an applied substrate d.c. bias voltage of − 250 V. The X-ray diffraction analysis for the as-deposited titania has confirmed the crystallinity and phase as brookite titania. Scanning Electron Microscope micrographs show the morphology of the brookite titania crystals with largest lateral dimensions of about 500 × 1200 nm, i.e. relatively large surface area crystals. There are no reports on the preparation of brookite titania crystals with such large surface areas.