Deep RIE and Cryo-Etching of Nanostructures in Silicon and Polymers

• DOI: 10.1017/s1431927608085395
• Publication Date: 2008-08-03T09:57:53Z
• Authors: G DeRose; M Shearn; D Henry; Y Chen; A Scherer
• Keywords: 02 engineering and technology; 0210 nano-technology

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – 7,