Modeling-Based Design of the Control Pattern for Uniform Macrostep Morphology in Solution Growth of SiC

• DOI: 10.1021/acs.cgd.2c01194
• Publication Date: 2023-01-06T06:19:32Z
• Authors: Yifan Dang; Xinbo Liu; Can Zhu; Yuma Fukami; Shuyang Ma; Huiqin Zhou; Xin Liu; Kentaro Kutsukake; Shunta Harada; Toru Ujihara
• Keywords: Crystal (programming language); Morphology; Flow Control

In the solution growth of SiC crystal, macrosteps with sufficient height on an off-axis substrate are required to reduce defects and achieve a high-quality grown layer. However, over-developed can induce new adversely affect crystal quality. To better understand control behavior corresponding parameters system, simulation method that consists global two-dimensional computational fluid dynamic (CFD) model, local three-dimensional CFD model near front, kinetics describes movement surface is proposed. The first applied investigate effect rotation speed macrostep morphology. Although results indicate higher in less step bunching, constantly rotating one direction demonstrated be incapable yielding uniform distribution whole surface. Accordingly, sophisticated pattern designed by periodically switching flow underneath surface, where proposed critical determine detailed control-parameter values. When suggested used, morphology ideal obtained practical experiment.