Epitaxial Growth of Aurivillius Bi3Fe2Mn2Ox Supercell Thin Films on Silicon

• DOI: 10.1021/acs.cgd.2c01300
• Publication Date: 2023-03-09T14:20:41Z
• Authors: James P. Barnard; Robynne L. Paldi; Matias Kalaswad; Zihao He; Hongyi Dou; Yizhi Zhang; Jianan Shen; Dongqi Zheng; Neil R. Dilley; Raktim Sarma; Aleem M. Siddiqui; Peide D. Ye; Haiyan Wang
• Keywords: Aurivillius; Supercell

Nanoelectronic devices integrated with functional complex oxides have drawn much attention in recent years. However, due to material and processing compatibility issues, integrating Si-based is challenging, success has been limited. As an example, the Bi3Fe2Mn2Ox (BFMO) supercell system, a single-phase layered oxide made by compositing BiFeO3 BiMnO3, studied for of past decade its unusual Aurivillius structure magnetic ferroelectric properties. most BFMO thin film growth demonstrated on single-crystal substrates such as SrTiO3 LaAlO3. In this work, we demonstrate that phase can be Si high epitaxial quality using buffer stack TiN/SrTiO3/CeO2. Further understanding strain-controlled allowed integration. Microstructure, magnetic, ferroelectric, optical properties films characterized compared those substrates, demonstrating comparable physical Integrating multiferroic demonstrates potential practical device applications field effect transistors.