Low-Dissipation Nanomechanical Devices from Monocrystalline Silicon Carbide

• DOI: 10.1021/acs.nanolett.4c06475
• Publication Date: 2025-04-03T02:42:24Z
• Authors: Leo Sementilli; Daniil M. Lukin; Hope Lee; Joshua Yang; Erick Romero; Jelena Vučković; Warwick P Bowen

The applications of nanomechanical resonators range from biomolecule mass sensing to hybrid quantum interfaces. Their performance is often limited by internal material damping, which can be greatly reduced using crystalline materials. Crystalline silicon carbide appealing due its exquisite mechanical, electrical, and optical properties, but has suffered high damping defects. Here we resolve this developing fabricated bulk monocrystalline 4H-silicon carbide. This allows us achieve as low 2.7 mHz, more than an order-of-magnitude lower any previous resonator corresponding a quality factor 20 million at room temperature. volumetric dissipation our devices reaches the limit for first time. provides path increase resonators.