Direct Measurement of the Electron Beam Spatial Intensity Profile via Carbon Nanotube Tomography

Intensity
DOI: 10.1021/acs.nanolett.9b01228 Publication Date: 2019-06-16T20:03:16Z
ABSTRACT
Electron microscopes have been improved to achieve ever smaller beam spots, a key parameter that determines the instrument's resolution. The techniques measure size of beam, however, not progressed same degree. There is an on-going need develop detection technologies can potentially characterize smallest electron further improve capabilities these instruments. We report on new detector based single-walled carbon nanotube. Nanotubes are atomically smooth, well-defined diameter similar in finest probes and be used directly profile. By scanning at different angles nanotube, we accurately determine spatial profile by applying tomographic reconstruction techniques.
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