Sacrificial Water-Soluble BaO Layer for Fabricating Free-Standing Piezoelectric Membranes

• DOI: 10.1021/acsami.0c05830
• Publication Date: 2020-05-12T13:59:40Z
• Authors: Ryota Takahashi; Mikk Lippmaa
• Keywords: Polydimethylsiloxane; Flexible Electronics

The use of a sacrificial water-soluble BaO layer was investigated for the purpose fabricating free-standing single-crystalline BaTiO3 membranes vibrational energy harvesting applications. An epitaxial BaTiO3/SrTiO3/BaO heterostructure deposited on SrTiO3(001) substrate by pulsed laser deposition. dissolved immersing in water. A membrane thereby released from and transferred onto glass or polyethylene terephthalate (PET) coated with polydimethylsiloxane (PDMS) adhesion layer. 200 nm-thick sandwiched between two flexible PDMS/ITO/PET electrode layers, forming harvester test device that could operate at an average electrical power output over 1 μW. This fabrication process is applicable to various structures materials dynamic strain-sensing