Highly Sensitive Ammonia Gas Detection at Room Temperature by Integratable Silicon Nanowire Field-Effect Sensors

• DOI: 10.1021/acsami.1c00585
• Publication Date: 2021-03-22T20:52:45Z
• Authors: Xiaopan Song; Ruijin Hu; Shun Xu; Zongguang Liu; Junzhuan Wang; Yi Shi; Jun Xu; Kunji Chen; Linwei Yu
• Keywords: Field effect; Nanosensor; Response time

Toxic gas monitoring at room temperature (RT) is of great concern to public health and safety, where ultrathin silicon nanowires (SiNWs), with diameter <80 nm, are ideal one-dimensional candidates achieve high-performance field-effect sensing. However, a precise integration the tiny SiNWs as active sensor channels has not been possible except for use expensive inefficient electron beam lithography etching. In this work, we demonstrate an integratable fabrication sensors based on orderly SiNW arrays, produced via step-guided in-plane solid–liquid–solid growth. The back-gated can be tuned into suitable subthreshold detection regime outstanding sensitivity (75.8% @ 100 ppm NH3), low limit (100 ppb), excellent selectivity NH3 RT, fast response/recovery time scales (Tres/Trec) 20 s (at ppb NH3) repeatability high stability over 180 days. These sensing performances attributed charge transfer between adsorbed molecules exposed channels, indicating convenient strategy fabricate deploy detectors that widely needed in booming marketplace wearable or portable electronics.