Advances in RF Glow Discharge Optical Emission Spectrometry Characterization of Intrinsic and Boron-Doped Diamond Coatings

• DOI: 10.1021/acsami.1c20785
• Publication Date: 2022-01-25T18:48:56Z
• Authors: Dhananjay K. Sharma; Ana V. Girão; Patrick Chapon; Miguel A. Neto; Filipe J. Oliveira; Rui F. Silva
• Keywords: Glow discharge; Rietveld Refinement

Accurate determination of the effective doping range within diamond thin films is important for fine-tuning electrical conductivity. Nevertheless, it not easily attainable by commonly adopted techniques. In this work, pulsed RF glow discharge optical emission spectrometry (GD-OES) combined with ultrafast sputtering (UFS) applied first time to acquire elemental depth profiles intrinsic coatings and boron content bulk distribution in films. The GD-OES practical advances presented here enabled quick profiling noteworthy resolution film interfaces. erosion rates layer thicknesses were measured using differential interferometric (DIP), demonstrating a close correlation between coating thickness carbon/hydrogen gas ratio. Moreover, DIP semiquantification methodology revealed nonhomogeneous crystalline structure, i.e., both substitutional interstitial framework. measurements also showed that linearly correlated increasing introduced into coating. This finding well supported X-ray diffraction (XRD) Rietveld refinement photoelectron spectroscopy (XPS). work demonstrates advantage applying advanced operation modes due its ease use, affordability, accuracy, high-speed profile analysis capability.